Crystal Orientation Dependence of Macropore Growth in n-Type Silicon

Electrochemical and Solid-State Letters

Volumn 2, Issue 3, 1999, Pages 126-128

  Rönnebeck, Silke ^a   Carstensen, J ^a   Ottow, S ^a   Foll H ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTAL ORIENTATION; ETCHING; HYDROFLUORIC ACID;

MACROPORE GROWTH;

POROUS SILICON;

EID: 0033101564     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1390756     Document Type: Article

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