Tensile strength of zinc oxide films measured by a microbridge method

Journal of Materials Research

Volumn 18, Issue 10, 2003, Pages 2464-2472

  Ong, C W ^a   Zong, D G ^a   Aravind, M ^a   Choy, C L ^a   Lu, D R ^b  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; DRY ETCHING; ELASTIC MODULI; FABRICATION; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; SILICON NITRIDE; TENSILE STRENGTH;

MICROBRIDGES;

ZINC OXIDE;

EID: 0242408411     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0343     Document Type: Article

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