Fabrication of c-axis oriented ZnO/AlN thin films prepared by radio frequency reactive sputtering and development of ZnO/AlN layered structure surface acoustic wave devices

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 1, 2002, Pages 42-46

  Yong, Yoon Joong ^a   Kang, Youn Seon ^a   Lee, Paul S ^a   Lee, Jai Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM; ATOMIC FORCE MICROSCOPY; ELECTRIC NETWORK ANALYZERS; ELECTROMECHANICAL DEVICES; INTERFACES (MATERIALS); SPUTTERING; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

RADIO FREQUENCY REACTIVE SPUTTERING;

THIN FILMS;

EID: 0036124758     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1428279     Document Type: Conference Paper

References (7)