Stress control of piezoelectric ZnO films on silicon substrates

Smart Materials and Structures

Volumn 5, Issue 6, 1996, Pages 748-750

  Cimpoiasu A ^a   Van Der Pers, N M ^b   De Keyser, Th H ^b   Venema, A ^a   Vellekoop, M J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CMOS INTEGRATED CIRCUITS; DEPOSITION; FILM GROWTH; INTEGRATED CIRCUIT MANUFACTURE; PIEZOELECTRIC MATERIALS; SEMICONDUCTING SILICON; SILICON WAFERS; STRESSES; SUBSTRATES; ZINC OXIDE;

STRESS CONTROL;

THIN FILMS;

EID: 0030378559     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/5/6/003     Document Type: Article

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