Measurement of elastic modulus of thin film ZnO by resonance method

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 4, 1999, Pages 768-770

  Jade, Sachin A ^a   Smits, Jan G ^a  

^a Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CERAMIC MATERIALS; ELASTIC MODULI; LASER BEAMS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; NATURAL FREQUENCIES; RESONANCE; SILICON WAFERS; THIN FILMS;

CERAMIC BIMORPH; ELASTIC MODULI MEASUREMENT;

ZINC OXIDE;

EID: 0032682057     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.775640     Document Type: Article

References (9)

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