Characterization of micro-opto-electro-mechanical devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3513, Issue , 1998, Pages 191-201

  Dadkhah, M S ^a   Burstein, A ^a   Motamedi, M E ^a   Park, S ^a  

^a ROCKWELL SCIENCE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; DIFFERENTIAL EQUATIONS; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; MATHEMATICAL MODELS; MICROOPTICS; OPTOELECTRONIC DEVICES;

MICROOPTOELECTROMECHANICAL (MOEM) DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032299222     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)