Evolution of microcrystalline growth pattern by ultraviolet spectroscopic ellipsometry on Si:H films prepared by Hot-Wire CVD

Solid State Communications

Volumn 128, Issue 11, 2003, Pages 397-402

  Das, Debajyoti ^a,b  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

A.Thin films; B. Chemical synthesis; C. Dielectric response; D. Ellipsometry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; ELLIPSOMETRY; POROSITY;

MICROCRYSTALLINE GROWTH PATTERNS;

SEMICONDUCTING FILMS;

EID: 0142242293     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2003.09.009     Document Type: Article

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