Low temperature growth of highly crystallized silicon thin films using hydrogen and argon dilution

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 852-856

  Hamma, S ^a   Roca I Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Ion bombardment; Microcrystalline silicon; Substrate temperature

Indexed keywords

AMORPHOUS SILICON; ARGON; CRYSTALLINE MATERIALS; ELLIPSOMETRY; HYDROGEN; INTERFACES (MATERIALS); ION BOMBARDMENT; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SPECTROSCOPIC ANALYSIS; SUBSTRATES; THIN FILMS;

HYDROGEN PLASMA TREATMENT; MICROCRYSTALLINE SILICON; SPECTROSCOPIC ELLIPSOMETRY MEASUREMENTS;

SEMICONDUCTING FILMS;

EID: 0032066784     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00342-1     Document Type: Article

References (15)

1. J. Meier, P. Torres, R. Platz, S. Dubail, U. Kroll, J.A. Anna Selvan, N. Pellaton Vaucher, C. Hof, D. Fischer, H. Keppner, A. Shah, K.D. Ufertt, P. Giannoulès, J. Koehler, MRS Symp. Proc. 420 (1996) 3.
2. N. Beck, J. Meier, J. Fric, Z. Rennes, A. Poruba, R. Flükiger, J. Pohl, A. Shah, M. Vanecek, J. Non-Cryst. Sol. 198-200 (1996) 238.
3. P. St'ahel, S. Hamma, P. Sladek, P. Roca i Cabarrocas, J. Non-Cryst. Solids 227-230 (1998) 276.
4. N. Layadi, P. Roca i Cabarrocas, B. Drévillon, I. Solomon, Phys. Rev. B 52 (1995) 5136.
5. P. Roca i Cabarrocas, N. Layadi, T. Heitz, B. Drévillon, Appl. Phys. Lett. 66 (1995) 3609.
6. S. Hamma, P. Roca i Cabarrocas, J. Appl. Phys. 81 (1997) 7282.
7. P. Roca i Cabarrocas, S. Hamma, A. Hadjadj, J. Bertomeu, J. Andreu, Appl. Phys. Lett. 69 (1996) 529.
8. D.E. Aspnes, A.A. Studna, Phys. Rev. B 27 (1983) 985.
9. G.E. Jellison Jr., M. Chisholm, S.M. Gorbatkin, App. Phys. Lett. 62 (1993) 3348.
10. S. Hamma, P. Roca i Cabarrocas, Thin Solid Films 296 (1997) 11.
11. C. Godet, B. Drévillon, J. Vac. Sci. Technol. A 6 (1988) 24 82.
12. P. Roca i Cabarrocas, J. Non-Cryst. Sol. 164-166 (1993) 37.
13. Y.H. Yang, M. Katiyar, J.R. Abelson, N. Maley, Mat. Res. Soc. Symp. Proc. 297 (1993) 25.
14. N. Blayo, B. Drévillon, Appl. Phys. Lett. 59 (1991) 950.
15. Y.Z. Hu, J.W. Andrews, M. Li, E.A. Irene, Nucl. Instr. Meth. Phys. Res. B 59 (60) (1991) 76.