Successful Selective Epitaxial Si1-xGex Deposition Process for HBT-BiCMOS and High Mobility Heterojunction pMOS Applications

Journal of the Electrochemical Society

Volumn 150, Issue 10, 2003, Pages

  Loo, R ^a   Caymax, M ^a   Peytier, I ^a   Decoutere, S ^a   Collaert, N ^a   Verheyen, P ^a,b   Vandervorst, W ^a,b   De Meyer, K ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; HETEROJUNCTION BIPOLAR TRANSISTORS; HETEROJUNCTIONS; PHOTOLUMINESCENCE; SEMICONDUCTING SILICON COMPOUNDS;

MICROLOADING;

CMOS INTEGRATED CIRCUITS;

EID: 0142053053     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1604789     Document Type: Article

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