Boron diffusion in silicon in the presence of other species

Applied Physics Letters

Volumn 77, Issue 17, 2000, Pages 2683-2685

  Li, Hong Jyh ^a   Kohli, Puneet ^a   Ganguly, Swaroop ^a   Kirichenko, Taras A ^a   Banerjee, Sanjay ^a   Zeitzoff, Peter ^b  

^a The University of Texas at Austin   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0142047690     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1320019     Document Type: Article

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