Electrochemical aspects of new materials and technologies in microelectronics

Microelectronic Engineering

Volumn 70, Issue 2-4, 2003, Pages 461-469

  Dubin, Valery M ^a  

^a INTEL CORPORATION   (United States)

Author keywords

Copper; Electrochemical technologies; Scaling

Indexed keywords

DIELECTRIC MATERIALS; ELECTROCHEMISTRY; ELECTROPLATING; LEAKAGE CURRENTS; PERMITTIVITY; SELF ASSEMBLY; TRANSISTORS;

ELECTROCHEMICAL TECHNOLOGIES;

MICROELECTRONICS;

EID: 0142011564     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00420-9     Document Type: Conference Paper

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