The structural aspects of non-crystalline SiO2 films on silicon: A review

Journal of Non-Crystalline Solids

Volumn 328, Issue 1-3, 2003, Pages 48-63

  Revesz, A G ^a   Hughes, H L ^b  

^a Revesz Associates   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; INTERFACES (MATERIALS); ION IMPLANTATION; POSITIVE IONS; THERMOOXIDATION;

BOND ENERGY;

SILICA;

EID: 0141843685     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(03)00467-8     Document Type: Article

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