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Applied Surface Science

Volumn 194, Issue 1-4, 2002, Pages 101-105

Density gradient in SiO 2 films on silicon as revealed by positron annihilation spectroscopy

(5) Revesz, A G a Anwand, W b Brauer, G b Hughes, H L c Skorupa, W b

a Revesz Associates (United States)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

c NAVAL RESEARCH LABORATORY (United States)

Author keywords

Positron annihilation; Si SiO 2 structures

Indexed keywords

CRYSTAL GROWTH; DEPOSITION; ETCHING; INTERFACES (MATERIALS); OXIDATION; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS; QUARTZ; SILICON;

POSITRON ANNIHILATIONS;

SEMICONDUCTING FILMS;

EID: 0037150995 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(02)00096-X Document Type: Conference Paper

Times cited : (12)

References (16)

1
- 0009770614
- (1994) J. Appl. Phys. , vol.76 , pp. 4035
- Asoka-Kumar, P.¹ Lynn, K.G.² Welch, D.G.³

2
- 0001470211
- (1997) J. Phys. Condens. Matter , vol.9 , pp. 2947
- Anwand, W.¹ Brauer, G.² Coleman, P.G.³ Goodyear, A.⁴ Reuther, H.⁵ Maser, K.⁶

3
- 0001328594
- (1996) J. Appl. Phys. , vol.79 , pp. 9029
- Clement, M.¹ De Nijs, J.M.M.² Van Veen, A.³ Schut, H.⁴ Balk, P.⁵

4
- 0000233879
- (1987) Phil. Mag. B , vol.55 , pp. 159
- Leroy, B.¹

5
- 36449006819
- (1994) J. Appl. Phys. , vol.75 , pp. 3822
- Uedono, A.¹ Wei, L.² Tanigawa, S.³ Suzuki, R.⁴ Ohgaki, H.⁵ Mikado, T.⁶ Kawano, T.⁷ Ohji, Y.⁸

6
- 0001211314
- (2000) J. Appl. Phys. , vol.87 , pp. 1990
- Eriguchi, K.¹ Harada, Y.² Niwa, M.³

7
- 0000134320
- (1993) Phys. Rev. B , vol.48 , pp. 17972
- Mrstik, B.J.¹ McMarr, P.J.²

8
- 0023399194
- (1987) J. Electrochem. Soc. , vol.134 , pp. 2020
- Mrstik, B.J.¹ Revesz, A.G.² Ancona, M.³ Hughes, H.L.⁴

9
- 0000510132
- Versaille
- (1971) Proceedings of the IXth International Conference on Glass , vol.1 , pp. 119
- Prjanishnikov, V.P.¹ Bartenev, G.M.² Ziganov, A.D.³ Gorbachev, V.V.⁴

10
- 0035272076
- (2001) Acta Phys. Polonica A , vol.99 , pp. 321
- Anwand, W.¹ Brauer, G.² Hasegawa, M.³ Dersch, O.⁴ Rauch, F.⁵

11
- 0032684556
- (1999) J. Non-Cryst. Solids , vol.254 , pp. 47
- Revesz, A.G.¹ Hughes, H.L.²

12
- 0017994417
- (1978) Appl. Phys. , vol.16 , pp. 231
- Brauer, G.¹ Boden, G.² Balogh, A.³ Andreeff, A.⁴

13
- 0003231784
- (1987) Diffusion Defect Data , vol.53-54 , pp. 173
- Brauer, G.¹ Boden, G.²

14
- 0000882676
- (1992) Mat. Sci. Forum , vol.105-110 , pp. 1989
- Stoll, H.¹ Wesolowski, P.² Koch, M.³ Maier, K.⁴ Major, J.⁵ Seeger, A.⁶

15
- 0029237629
- (1995) Mat. Sci. Forum , vol.175-178 , pp. 269
- Hasegawa, M.¹ Tabata, M.² Miyamoto, T.³ Nagashima, Y.⁴ Hyodo, T.⁵ Fujinami, M.⁶ Yamaguchi, S.⁷

16
- 0035007918
- (2001) Mat. Sci. Forum , vol.363-365 , pp. 64
- Rivera, A.¹ Montilla, I.² Alba Garcia, A.³ Escobar Galindo, R.⁴ Falub, C.V.⁵ Van Veen, A.⁶ Schut, H.⁷ De Nijs, J.M.M.⁸ Balk, P.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.