Fabrication of size-tunable large-area periodic silicon nanopillar arrays with sub-10-nm resolution

Journal of Physical Chemistry B

Volumn 107, Issue 37, 2003, Pages 9950-9953

  Kuo, Chun Wen ^a   Shiu, Jau Ye ^a   Chen, Peilin ^a   Somorjai, Gabor A ^b,c  

^a ACADEMIA SINICA   (Taiwan)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); ETCHING; LITHOGRAPHY; OXIDATION; PARTICLE SIZE ANALYSIS; SEMICONDUCTING SILICON;

NANOSPHERE LITHOGRAPHY; PARTICLE DENSITY; SILICON NANOPILLAR ARRAYS;

NANOTECHNOLOGY;

EID: 0141794142     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp035468d     Document Type: Letter

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