Progress in epitaxial oxides on semiconductors

Materials Research Society Symposium - Proceedings

Volumn 747, Issue , 2003, Pages 31-42

  Yu, Z ^a   Liang, Y ^a   Li, H ^a   Curless, J ^a   Overgaard, C ^a   Droopad, R ^a   Wei, Y ^a   Hu, X ^a   Craigo, B ^a   Finder, J ^a   Eisenbeiser, K ^a   Talin, A ^a   Smith, S ^a   Voight, S ^a   Wang, J ^a   Marshall, D ^a   Jordan, D ^a   Edwards Jr , J ^a   Moore, K ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CMOS INTEGRATED CIRCUITS; DIELECTRIC MATERIALS; EPITAXIAL GROWTH; MOS CAPACITORS; NUCLEATION; STRONTIUM COMPOUNDS;

EPITAXIAL OXIDES;

SEMICONDUCTOR MATERIALS;

EID: 0043021889     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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