Microstructural characterization and mechanical reliability of interfaces in piezoelectric based microelectromechanical systems

Thin Solid Films

Volumn 441, Issue 1-2, 2003, Pages 180-186

  Eakins, L M R ^a   Olson, B W ^a   Richards, C D ^a   Richards, R F ^a   Bahr, D F ^a  

^a Washington State University   (United States)

Author keywords

Adhesion; Interdiffusion; Pt morphology; PZT

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DELAMINATION; GRAIN SIZE AND SHAPE; INDENTATION; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SURFACE ROUGHNESS;

MECHANICAL RELIABILITY;

PIEZOELECTRIC DEVICES;

EID: 0042509908     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00904-0     Document Type: Article

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