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Volumn 158, Issue 1, 2000, Pages 21-27
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Microstructure and electrical properties of PbZr0.48Ti0.52O3 ferroelectric films on different Pt bottom electrodes
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC PROPERTIES;
ELECTRODES;
ELECTRON BEAMS;
EVAPORATION;
FERROELECTRIC MATERIALS;
HEAT TREATMENT;
MICROSTRUCTURE;
MORPHOLOGY;
SEMICONDUCTING LEAD COMPOUNDS;
SPUTTERING;
SURFACE PHENOMENA;
THERMAL EFFECTS;
COLUMNAR PROTRUSION;
ELECTRON BEAM EVAPORATION;
HILLOCK FORMATION;
PLATINUM BOTTOM ELECTRODES;
THIN FILMS;
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EID: 0033688930
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(99)00588-7 Document Type: Article |
Times cited : (28)
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References (13)
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