The microstructure, phase and ferroelectric properties of PZT thin films on oriented multilayer electrodes

Materials Research Society Symposium - Proceedings

Volumn 596, Issue , 2000, Pages 199-204

  Li, Tingkai ^a   Hsu, Sheng Teng ^a   Gao, Yufei ^b   Engelhard, Mark ^b  

^a SHARP LABORATORIES OF AMERICA   (United States)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL MICROSTRUCTURE; ELECTRODES; FERROELECTRICITY; FILM GROWTH; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MULTILAYERS; ORGANIC SOLVENTS; PHASE TRANSITIONS; PRESSURE EFFECTS; THERMAL EFFECTS;

BUTYL ETHER; ELECTRON BEAM EVAPORATION TECHNIQUES; FERROELECTRIC PROPERTIES; HIGH TEMPERATURE ANNEALING; ISOPROPANOL; LEAD ZIRCONATE TITANATE THIN FILMS; TETRAGLYME; TETRAHYDROFURAN;

THIN FILMS;

EID: 0033696298     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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