Electrical properties of sputtered PZT films on stabilized platinum electrode

Journal of the European Ceramic Society

Volumn 19, Issue 11, 1999, Pages 2005-2013

  Velu G ^a   Remiens D ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

Electrical properties; Films; PZT; Sputtering; TiO2.

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; ELECTRODES; FERROELECTRIC MATERIALS; FERROELECTRICITY; MAGNETRON SPUTTERING; PLATINUM; THIN FILMS; TITANIUM;

FERROELECTRIC LEAD ZIRCONATE TITANATE; POST ANNEALING TREATMENT;

TITANIUM OXIDES;

EID: 0032654444     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0955-2219(99)00008-4     Document Type: Article

References (26)

1. Kingon, A. I., Streiffer, S. K., Basceri, C. and Summerfelt, S. R., Mater. Res. Bull., 1996, 71, 46.
2. Kojima, M., Sunagawa, M., Seto, H., Matsui, Y. and Hamakawa, Y., Jpn. J. Appl. Phys., 1982, 22, 255.
3. Okuyama, M. and Hamakawa, Y., Ferroelectrics, 1985, 63, 243.
4. Araujo, C. A., Mc Millan, L. D., Melnick, B. M., Cuchiaro, J. D. and Scott, L. F., Ferroelectrics, 1990, 104, 241.
5. Olowolafe, J. O., Jones, R. E. Jr, Campbell, A. C., Hedge, R. I. and Mogab, C. J., J. Appl. Phys., 1993, 73, 1764.
6. Fox, G. R., Trolier-McKinstry, S. and Krupanidhi, S. B., J. Mater. Res., 1995, 10, 1508.
7. Al-Shareef, H. N., Gifford, K. D., Rou, S. H., Hren, P. D., Auciello, O. and Kingon, A. I., Int. Ferroelectrics, 1993, 3, 321.
8. Rèmiens, D., Jaber, B., Tirlet, J. F., Joire, H., Thierry, B. and Moriamez, Cl., J. Eur. Ceram. Soc., 1994, 13, 493.
9. Klee, M., Eusemann, R., Waser, R. and Setter, N., J. Appl. Phys., 1992, 72, 1566.
10. Torii, K., Kaga, T., Kushida, K., Takeuchi, H. and Takeda, E., Jpn. J. Appl. Phys., 1991, 30, 3562.
11. Sreenivas, K., Reaney, I., Maeder, T. and Setter, N., J. Appl. Phys., 1994, 75, 232.
12. Chung, S., Kim, J. W., Kim, G. H., Park, C. O. and Lee, W. J., Jpn. J. Appl. Phys., 1997, 36, 4386.
13. Kim, S. T., Kim, H. H., Lee, M. Y. and Lee, W. J., Jpn. J. Appl. Phys., 1997, 36, 294.
14. Spierings, G. A. C. M., Van Zon, J. B. A. and Larsen, P. K., Int. Ferroelectrics, 1993, 3, 283.
15. Summerfelt, R. S., Kotechi, D., Kingon, A. and Al-Shareef, H. N., Mat. Res. Soc. Symp., 1995, 361, 257.
16. Grill, A., Beach, D., Smart, C. and Kane, W., Mat. Res. Soc. Symp. Proc., 1993, 310, 189.
17. Hren, P. D., Rou, S. H., Al-Shareef, H. N., Ameen, M. S., Auciello, O. and Kingon, A. I., Int. Ferroelectrics, 1992, 2, 311.
18. Nam, Hyo-Ern, Kim, Hyun-Ho and Lee, Win-Jong., Jpn. J. Appl. Phys., 1998, 37, 3462.
19. Muralt, P., Maeder, T., Sagalowicz, L. and Hiboux, S., J. Appl. Phys., 1998, 83, 3835.
20. Roy, R. A. and Etzold, K. F., J. Mater. Res., 1992, 7, 1455.
21. Dana, S. S., Etzold, K. F. and Glabes, J. G., J. Appl. Phys., 1991, 69, 4398.
22. Jonscher, A. K., In Physics of Thin Films, Vol. II, ed. G. Hass and M. H. Francombe. Academic Press, New York, 1980, 205.
23. Fukami, T. and Fujii, F., Jpn. J. Appl. Phys., 1985, 24, 632.
24. Rèmiens, D., Jaber, B., Tronc, P. and Thierry, B., J. Eur. Ceram. Soc., 1996, 16, 467.
25. Beach, D. B., Laibowitz, R. B., Shaw, T. M., Grill, A. and Kane, W. K., Int. Ferroelectrics, 1995, 7, 161.
26. Baudry, L., Cattan, E., Vélu, G., Tournier, J., Rémiens, D., Proc. of the IV European Conf. on Applications of Polar Dielectrics in Ferroelectrics, Montreux, 24-27 August 1998, 485.