Challenges of macro integration for fully automated 300 mm fabs

Solid State Technology

Volumn 43, Issue 10, 2000, Pages

  Chase, Michael ^a   Scott, Douglas ^a   Nestel Patt, Jeff ^a  

^a PRI Automation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; INDUSTRIAL ENGINEERING; INTEGRATED CIRCUIT MANUFACTURE; PROCESS CONTROL; SILICON WAFERS;

MACRO INTEGRATION; WAFER PROCESSING;

WSI CIRCUITS;

EID: 0034301145     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (7)