A review of the various efforts to a silicon laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4997, Issue , 2003, Pages 206-220

  Pavesi, L ^a  

^a UNIVERSITY OF TRENTO   (Italy)

Author keywords

Erbium; Intracenter recombinations; Nanocrystals; Quantum cascade; Silicon germanium; Silicon laser; Stimulated emission

Indexed keywords

CMOS INTEGRATED CIRCUITS; LIGHT EMITTING DIODES; NANOSTRUCTURED MATERIALS; QUANTUM THEORY; SEMICONDUCTING SILICON;

SILICON LASERS;

SEMICONDUCTOR LASERS;

EID: 0041859728     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476660     Document Type: Conference Paper

References (70)

1. International Technology Roadmap for Semiconductors, 2000 Update, Interconnect (http://public.itrs.net.)
2. R A Soref, Proc. of IEEE 81 (12 dec 1993) 1687.
3. L. C. Kimerling Appl. Surf. Science 159-160 (2000) 8.
4. O Bisi, S U Campisano, L Pavesi and F Priolo Silicon based microphotonics (IOS press, Amsterdam 1999)
5. G Masini, L Colace and G Assanto Mat. Science Eng. B89 (2002) 2-9
6. A Irace, G Coppola, G Breglio and A Cutulo IEEE J. Sci. Top. Quantum Elect. 6 (2000) 14
7. B Li, Z Jiang, X Zhang, X Wang, J Wan, G Li and E Liu Appl. Phys. Lett. 74 (1999) 2108
8. S M Csutak, J D Schaub, W E Wu and J C Campbell IEEE Photon. Technol. Lett. 14 (2002) 516
9. S Winnerl, D Buca, S Lenk, Ch Buchal, S Mantl and D-X Xu Mat. Science Eng. B89 (2002) 73-76
10. B Gelloz and N Koshida J. Appl. Phys. 88 (2000) 4319
11. MA Green, J Zhao, A Wang, PJ Reece and M Gal Nature 412 (2001) 805
12. Towards the first silicon laser, edited by L. Pavesi, S. Gaponenko and L. Dal Negro, NATO Science Series (Kluwer Academic Publishers, Dordrecht 2003)
13. W.L. Ng, M.A. Lourenço, R.M Gwilliam, S. Ledain, G. Shao and K.P Homewood Nature 410 (2001) 192-194.
14. W P Dumke Phys. Rev. 127 (1962) 1559
15. O. Gusev, M. Bresler, I. Yassievich, B. Zakharchenya Efficient electroluminescence in alloyed silicon diodes in Ref. 12 pag. 21.
16. David Sotta "Milieux emetteurs de lumiere et microcavites optique en silicium monocristallin sur isolant", Thesis Specialite physique, Universite Joseph Fourier Grenoble I (Grenoble, France 2002)
17. P. Jonsson, H. Bleichner, M. Isberg, and E. Nordlander J. Appl. Phys. 81 (1997) 2256
18. L. T. Canham, Appl. Phys. Lett. 57 (1990) 1046.
19. O. Bisi, S. Ossicini and L. Pavesi, Surface Science Reports 264 (2000) 1-126.
20. M. Zacharias, et al. Silicon technology used for size-controlled silicon nanocrystals in Ref. 12 pag. 131
21. L Pavesi, L Dal Negro, C Mazzoleni, G Franzò and F Priolo Nature 408 (2000) 440
22. L. Dal Negro, et al. Stimulated emission in plasma enhanced chemical vapour deposited silicon nanocrystals, Physica E (2003).
23. L Khriachtchev, M Rasanen, S Novikov, J Sinkkonen Appl. Phys. Lett. 79 (2001) 1249
24. M H Nayfeh, et al. Appl. Phys. Lett. 78 (2001) 1131
25. M H Nayfeh, S Rao, N Barry Appl.Phys. Lett. 80 (2002) 121
26. K. Luterova, et al. J. Appl. Phys. 91 (2002) 2896
27. Philippe M. Fauchet and Jinhao Ruan, Optical amplification in nanocrystalline silicon superlattices in Ref. 12 pag. 197.
28. M. Ivanda, et al. Experimental observation of optical amplification in silicon nanocrystals, in Ref. 12 pag. 191.
29. L. Dal Negro, et al. Stimulated emission in silicon nanocrystals in ref. 12 pag. 145
30. J.Valenta, I. Pelant, J. Linnros Appl. Phys. Lett. 81 (2002) 1396
31. F Icona, G Franzò, EC Moreira, F Priolo J. Appl Phys. 89 (2001) 8354
32. A review is in Z. Gaburro and L. Pavesi Light Emitting Diodes for Si Integrated Circuits in Handbook of luminescence, Display Materials, and Nanocomposites Edited by H. S. Nalwa and L. S. Rohwer (American Scientific Publishers, 2003)
33. G Franzò, et al. Appl. Phys. A74 (2002) 1
34. Ching-Fuh Lin, Peng-Fei Chung, and Miin-Jang Chen Wei-Fang Su Optics Lett. 27 (2002) 713
35. Heikkila L, T. Kuusela T, Hedman HP Superl. Microstructures 26 (1999) 157
36. P. C. Becker, N. A. Olsson, J. R. Simpson Erbium-doped Fibre Amplifiers (Academic Press, London 1999)
37. 3+ in crystalline silicon in Ref. 4 pag. 279; A. Polman, Erbium implanted thin film photonic materials, J. Appl. Phys. 82, 1 (1997).
38. 3+ in crystalline silicon in Ref. 4 pag. 279; A. Polman, Erbium implanted thin film photonic materials, J. Appl. Phys. 82, 1 (1997).
39. G. Franzò, F. Priolo, S. Coffa, A. Polman, and A. Carnera, Appl. Phys. Lett. 64, 2235 (1994).
40. S. Coffa, G. Franzò, and F. Priolo, Appl. Phys. Lett. 69 (1996) 2077
41. S. Coffa, G. Franzò, F. Priolo, A. Pacelli, and A. Lacaita, Appl. Phys. Lett. 73 (1998) 93
42. G. Franzò, V. Vinciguerra, F. Priolo Appl. Phys. A69 (1999) 3; G. Franzo, et al, Appl. Phys. Lett. 76 (2000) 2167.
43. G. Franzò, V. Vinciguerra, F. Priolo Appl. Phys. A69 (1999) 3; G. Franzo, et al, Appl. Phys. Lett. 76 (2000) 2167.
44. M. Zacharias, et al., Physica E 11 (2001) 245.
45. Pieter G. Kik and Albert Polman Towards an Er-doped Si nanocrystal sensitized waveguide laser in Ref. 12 pag. 383
46. F. Iacona, at al. Appl. Phys. Lett. 81 (2002) 3242
47. M. E. Castagna, S. Coffa, L. Carestia, A. Messian, C. Buongiorno, Proceedings of ESSDERC (Bologna 2002).
48. Xinwei Zhao, Shuji Komuro, Hideo Isshiki, Yoshinobu Aoyagi, and Takuo Sugano Appl. Phys. Lett. 74 (1999) 120
49. Jung H. Shin, Hak-Seung Han and Se-Young Seo Optical gain using nanocrystal sensitized Erbium in Ref. 12 pag. 401
50. L. Dal Negro, et al. Enhanced emission cross section and vsl analysis of erbium coupled silicon nanocrystals to be published.
51. F. Priolo, G. Franzo, D. Pacifici, V. Vinciguerra, F. Iacona, and A. Irrera, J. Appl. Phys. 89, (2001) 264
52. A. J. Kenyon, et al. J. Appl. Phys 91 (2002) 367
53. Hak-Seung Han, Se-Young Seo, Jung H. Shin, Namkyoo Park Appl. Phys. Lett. 81 (2002) 3720
54. P. G. Kik and A. Polman, J. Appl. Phys. 91 (2002) 534
55. R. A. Soref, Thin Solid Films 294 (1997) 325
56. C Gmachl, F Capasso, DL Sivco, et al. Rep Prog Phys 64 (2001) 1533- 1601
57. G. Dehlinger, et al. Materials Science and Engineering B89 (2002) 30-35
58. L. Diehl, et al. Appl. Phys. Lett. 81 (2002) 4700
59. K Bormann, et al. Appl. Phys. Lett. 80 (2002) 2260
60. L. Diehl, et al. Strain compensated Si/SiGe quantum cascade emitters grown on SiGe pseudosubstrates in Ref. 12 pag. 325
61. R Kohler, A Tredicucci, F Beltram, H Beere, E Linfield, G Davies, and D Ritchie, R C Iotti and F Rossi, Nature 417 156 (2002)
62. S. A. Lynch, et al. Appl. Phys. Lett. 81(2002)1543
63. S.A. Lynch, et al. Materials Science and Engineering B89 (2002) 10-12
64. R. W. Kelsall, et al. Terahertz emission from Silicon-Germanium quantum cascade in Ref. 12 pag. 367
65. S. G. Pavlov, et al. Terahertz silicon laser: Intracenter optical pumping in Ref. 12 pag 331; V. N. Shastin, et al. Silicon lasers based on shallow donor centers Theoretical background and experimental results in Ref. 12 pag. 341
66. S. G. Pavlov, et al. Terahertz silicon laser: Intracenter optical pumping in Ref. 12 pag 331; V. N. Shastin, et al. Silicon lasers based on shallow donor centers Theoretical background and experimental results in Ref. 12 pag. 341
67. N. Shastin, et al. Appl. Phys. Lett. 80 (2002) 3512
68. A. Blom, M. A. Odnoblyudov, H. H. Cheng, I. N. Yassievich, K. A. Chao Appl. Phys. Lett. 79 (2001) 713
69. S. G. Pavlov, et al., Phys. Rev. Lett. 84 (2000) 5220; S. G. Pavlov, et al. J. Appl.
70. S. G. Pavlov, et al., Phys. Rev. Lett. 84 (2000) 5220; S. G. Pavlov, et al. J. Appl.