SiGe/Si Mach-Zehnder interferometer modulator based on the plasma dispersion effect

Applied Physics Letters

Volumn 74, Issue 15, 1999, Pages 2108-2109

  Li, Baojun ^a   Jiang, Zuimin ^a   Zhang, Xiangjiu ^a   Wang, Xun ^a   Wan, Jianjun ^b   Li, Guozheng ^b   Liu, Enke ^b  

^a FUDAN UNIVERSITY   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC DISPERSION; ELECTRON IRRADIATION; INSERTION LOSSES; INTERFEROMETERS; ION IMPLANTATION; LIGHT MODULATION; OPTICAL WAVEGUIDES; PHASE SHIFT; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES;

MACH-ZEHNDER INTERFEROMETER MODULATORS; PLASMA DISPERSION EFFECTS;

LIGHT MODULATORS;

EID: 0032621816     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123771     Document Type: Article

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