Infrared properties of room-temperature-deposited ZrO2

Applied Physics Letters

Volumn 79, Issue 3, 2001, Pages 320-322

  Koltunski, L ^a   Devine, R A B ^a  

^a UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRON CYCLOTRON RESONANCE; INFRARED RADIATION; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLARIZATION; POLYCRYSTALLINE MATERIALS; REFRACTIVE INDEX; SUBSTRATES; ZIRCONIA;

INFRARED VIBRATIONAL MODES;

THIN FILMS;

EID: 0035898490     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1384476     Document Type: Article

References (12)