A Method for Real-Time Control of Thin Film Composition using OES and XPS

Proceedings of the American Control Conference

Volumn 2, Issue , 2003, Pages 1320-1327

  Ni, Dong ^a   Lou, Yiming ^a   Christofides, Panagiotis D ^a   Sha, Lin ^a   Lao, Sandy ^a   Chang, Jane P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; FEEDBACK CONTROL; LIGHT EMISSION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

OPTICAL EMISSION SPECTROSCOPY (OES);

REAL TIME SYSTEMS;

EID: 0041445542     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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