Parallel assembly of microsystems using Si micro electro mechanical systems

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 445-452

  Skidmore, G ^a   Ellis, M ^a   Geisberger, A ^a   Tsui, K ^a   Saini, R ^a   Huang, T ^a   Randall, J ^a  

^a ZYVEX CORPORATION   (United States)

Author keywords

MEMS; Micro systems; Parallel assembly

Indexed keywords

AUTOMATION; COSTS; INTEGRATED CIRCUIT MANUFACTURE; MONOLITHIC INTEGRATED CIRCUITS; PARALLEL PROCESSING SYSTEMS; SEMICONDUCTING SILICON;

PARALLEL ASSEMBLY;

MICROELECTROMECHANICAL DEVICES;

EID: 0037682257     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00100-X     Document Type: Conference Paper

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