Nano-replication of diffractive optical elements in sol-gel derived glasses

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 710-719

  Parashar, V K ^a   Sayah, A ^a   Pfeffer, M ^b   Schoch, F ^b   Gobrecht, J ^c   Gijs, M A M ^a  

^a EPFL   (Switzerland)

^b SwissOptic AG   (Switzerland)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

Colloids; Diffractive optical elements; Glass; Replication; Sol gel

Indexed keywords

CRACK INITIATION; DENSIFICATION; ELECTROMAGNETIC WAVE DIFFRACTION; MOLDING; NANOSTRUCTURED MATERIALS; OPTICAL GLASS; ORGANOMETALLICS; PARTICLE SIZE ANALYSIS; SOL-GELS;

NANO-REPLICATION;

OPTICAL DEVICES;

EID: 0037682192     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00132-1     Document Type: Conference Paper

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