Micro-replication of optical lenses in glass using a novel sol gel technology

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 516-519

  Sayah, A ^a   Parashar, V K ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; IMAGING TECHNIQUES; LIGHT INTERFERENCE; OPTICAL GLASS; OPTICAL INSTRUMENT LENSES; OPTICAL SYSTEMS; OPTICAL VARIABLES MEASUREMENT; ORGANIC POLYMERS; SOL-GELS;

FOCAL LENGTH; LENS INTERFERENCE EFFECTS; OPTICAL IMAGING SYSTEM; POLYDIMETHYL SILOXANE; SOL GEL GLASS REPLICATION TECHNOLOGY;

MICROLENSES;

EID: 0036124336     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Dry etching for coherent refractive microlens arrays
2. Replication techniques for diffractive optical elements
3. Micro-optics for sensor applications
4. Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists
5. Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp
6. 2 gel films fabricated with the two-ultraviolet-beam interference method
7. Gratings fabrication by ultraviolet light imprinting and embossing in a sol-gel silica glass