High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electron-beam lithography

Applied Optics

Volumn 41, Issue 13, 2002, Pages 2390-2393

  Shiono, Teruhiro ^a   Hamamoto, Tetsuya ^b,c   Takahara, Koji ^b,d  

^a PANASONIC CORPORATION   (Japan)

^b OSAKA SCIENCE AND TECHNOLOGY CENTER   (Japan)

^c DAINIPPON SCREEN MFG CO LTD   (Japan)

^d Konica Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; DIFFERENTIATION (CALCULUS); ELECTRON BEAM LITHOGRAPHY; OPTICAL DISK STORAGE;

DIFFRACTIVE OPTICAL ELEMENTS (DOE);

DIFFRACTION GRATINGS;

EID: 0036575169     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.002390     Document Type: Article

References (11)

1. T. Fujita, H. Nishihara, and J. Koyama, “Blazed gratings and Fresnel lenses fabricated by electron-beam lithography,” Opt. Lett. 7, 578-580 (1982).
2. G. J. Swanson and W. B. Veldkamp, “Diffractive optical elements for use in infrared systems,” Opt. Eng. 28, 605- 608 (1989).
3. H. Nishihara and T. Suhara, “Micro Fresnel lenses,” in Progress in Optics, E. Wolf, ed. (North-Holland, Amsterdam, 1987), Vol. 24, pp. 1-37.
4. T. Shiono, “Diffractive microlenses fabricated by electron-beam lithography,” in Optical Computing Hardware, J. Lahns and S. Lee, eds. (Academic, Boston, 1993), pp. 169-192.
5. M. T. Gale, “Direct writing of continuous-relief micro-optics,” in Micro-Optics, H. P. Herzig, ed. (Taylor & Francis, London, 1997), pp. 87-126.
6. M. Ekberg, F. Nikolajeff, M. Larsson, and S. Hard, “Proximity-compensated blazed transmission grating manufacture with direct-writing, electron-beam lithography,” Appl. Opt. 33,103-107 (1994).
7. P. Laakkonen, M. Kuittinen, J. Simonen, and J. Turunen, “Electron-beam-fabricated asymmetric transmission gratings for microspectroscopy,” Appl. Opt. 39, 3187-3191 (2000).
8. R. Petit, ed., Electromagnetic Theory of Gratings (SpringerVerlag, Berlin, 1980).
9. G. J. Swanson, “Binary optics technology: theoretical limits on the diffraction efficiency of multilevel diffractive optical elements,” MIT Tech. Rep. 914 (MIT Press, Cambridge, Mass., 1991), pp. 1-27.
10. T. Shiono, M. Kitagawa, K. Setsune, and T. Mitsuyu, “Reflection micro-Fresnel lenses and their use in an integrated focus sensor,” Appl. Opt. 28, 3434-3442 (1989).
11. E. Noponen, J. Turunen, and A. Vasara, “Electromagnetic theory and design of diffractive-lens arrays,” J. Opt. Soc. Am. A 10, 434-443 (1993).