Nanoscale embossing of polymers using a thermoplastic die

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 125-128

  Casey, B G ^a   Cumming, D R S ^b   Khandaker, I I ^a   Curtis, A S G ^a   Wilkinson, C D W ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; PLASTICS FORMING DIES; POLYMETHYL METHACRYLATES; SEMICONDUCTING POLYMERS; THERMOPLASTICS;

NANOSCALE EMBOSSING;

NANOTECHNOLOGY;

EID: 0033132119     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00031-3     Document Type: Article

References (7)

1. [1] Cumming, D.R.S., Khandaker, I.I., Thoms, S., Casey, B.G., Efficient diffractive optics made by single-step electron beam lithography in solid PMMA, Journal of Vacuum Science & Technology B, vol. 15, pp. 2859-2863, 1997.
2. [2] Chou, S.Y., Krauss, P.R., Renstrom, P.J., Imprint Of Sub-25 Nm Vias and Trenches In Polymers, Applied Physics Letters, vol. 67, pp. 3114-3116, 1995.
3. [3] Curtis, A.S.G., Macdonald, K., Wojciak-Stotard, B., Casey, B.G., Wilkinson, C.D.W., The Reaction of Cells to Nanometric Topography, To be published 1998.
4. [4] McCrum, N.G., Buckley, C.P., Bucknall, C.B., Principles of Polymer Engineering, Oxford University Press, UK, 1997.
5. [5] Casey, B.G., Monaghan, W., Wiikinson, C.D.W., Embossing of nanoscale features and environments, Microelectronic Engineering, vol. 35, pp. 393-396, 1997.
6. [6] Curtis, A.S.G., Pitts, J.D , Cell Adhesion and Motility, Cambridge University Press, UK, 1980.
7. [7] Bellairs, R., Curtis, A.S.G., Dunn, G.A., Cell Behaviour, Cambridge University Press, UK, 1981.