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Volumn 42, Issue 2 A, 2003, Pages 620-622

Mechanical properties of silicon carbonitride thin films

Author keywords

Bond impact; Hardness; Silicon carbonitride

Indexed keywords

CHEMICAL BONDS; ELASTIC MODULI; HARDNESS; INDENTATION; SILICON CARBIDE; SILICON NITRIDE; SPUTTERING; STIFFNESS;

BOND IMPACT; NANOINDENTATION; SILICON CARBONITRIDE;

THIN FILMS;

EID: 0037667835 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.620 Document Type: Article

Times cited : (15)

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