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Journal of Materials Science Letters

Volumn 15, Issue 15, 1996, Pages 1355-1357

Carbon nitride films prepared by ion implantation

(4) Gu, Y S a Pan, L Q a Chang, X R a Tian, Z Z a

a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CALCULATIONS; CHEMICAL BONDS; CRYSTAL STRUCTURE; FILM PREPARATION; ION IMPLANTATION; LATTICE CONSTANTS; MAGNETRON SPUTTERING; NITROGEN; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

ATOMIC CONCENTRATION; CARBON NITRIDE FILMS; CARBON NITROGEN BONDS; NITROGEN CONCENTRATION; SCANNING AUGER MICROPROBE;

CARBON INORGANIC COMPOUNDS;

EID: 0030212692 PISSN: 02618028 EISSN: None Source Type: Journal
DOI: 10.1007/BF00240806 Document Type: Article

Times cited : (26)

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