Preparation of electrically conductive diamond-like carbon films using i-C4H10/N2 supermagnetron plasma

Journal of Applied Physics

Volumn 89, Issue 5, 2001, Pages 2737-2741

  Kinoshita, Haruhisa ^a   Hando, Takuya ^a   Yoshida, Masahiro ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001048603     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1344586     Document Type: Article

References (14)

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