Low-temperature thin-film silicon MEMS

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 181-186

  Conde, J P ^a   Gaspar, J ^a,b   Chu, V ^b  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^b INESC   (Portugal)

Author keywords

Amorphous silicon; Large area electronics; MEMS; Thin film technology

Indexed keywords

AMORPHOUS SILICON; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; LOW TEMPERATURE OPERATIONS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NATURAL FREQUENCIES; SEMICONDUCTING FILMS;

LARGE AREA ELECTRONICS;

THIN FILMS;

EID: 0037416759     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01218-X     Document Type: Conference Paper

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