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Journal of Applied Physics

Volumn 91, Issue 10 I, 2002, Pages 7774-7776

Microelectromechanical system microbridge deflection monitoring using integrated spin valve sensors and micromagnets

(6) Li, Haohua a,b Boucinha, M a,b Freitas, P P a,b Gaspar, J a,b Chu, V a Conde, J P b

a INESC (Portugal)

b INSTITUTO SUPERIOR TÉCNICO (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

A-SI:H; AIR-GAPS; APPLIED VOLTAGES; BIAS FIELD; BRIDGE DEFLECTION; BRIDGE MOVEMENTS; DEFLECTION MONITORING; EXCITATION VOLTAGE; EXTERNAL FIELDS; FRINGE FIELDS; GATE VOLTAGES; LOW FREQUENCY; MICRO-BRIDGE; MICROMAGNETS; NM RESOLUTION; ON CHIPS; SENSOR OUTPUT; SENSOR RESPONSE; SPIN-VALVE SENSORS; SQUARE-WAVE; TRANSFER CURVES;

ELECTROMECHANICAL DEVICES; MAGNETORESISTANCE; MAGNETS; MECHATRONICS; MEMS; MICROMECHANICS; PLATINUM;

SENSORS;

EID: 0037094809 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1451896 Document Type: Article

Times cited : (14)

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