Electromechanical properties of amorphous and microcrystalline silicon micromachined structures

Materials Research Society Symposium - Proceedings

Volumn 664, Issue , 2001, Pages

  Gaspar, J ^a   Boucinha, M ^a   Chu, V ^a   Conde, J P ^a  

^a INESC   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC POTENTIAL; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

MICROCRYSTALLINE SILICON;

AMORPHOUS SILICON;

EID: 0035556357     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-664-a26.4.1     Document Type: Conference Paper

References (6)