Integrated magnetic sensing of electrostatically actuated thin-film microbridges

Materials Research Society Symposium - Proceedings

Volumn 729, Issue , 2002, Pages 101-106

  Gaspar, J ^a,b   Li, Haohua ^a,b   Freitas, P P ^a,b   Chu, V ^a   Conde, J P ^b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; ELECTROSTATICS; HYDROGENATION; LOW TEMPERATURE EFFECTS; MAGNETIC DEVICES; MAGNETIC FIELD EFFECTS; MICROMACHINING; PERMANENT MAGNETS; SENSORS;

ELECTROSTATISTICALLY ACTUATED THIN FILM MICROBRIDGES; INTEGRATED MAGNETIC SENSING; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036920052     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-729-u3.7     Document Type: Conference Paper

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