Amorphous silicon air-gap resonators on large-area substrates

Applied Physics Letters

Volumn 77, Issue 6, 2000, Pages 907-909

  Boucinha, M ^a   Brogueira, P ^b   Chu, V ^a   Conde, J P ^b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000459446     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1306912     Document Type: Article

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