SCOPUS 정보 검색 플랫폼

Solid State Phenomena

Volumn 80-81, Issue , 2001, Pages 429-440

Thin-film microelectromechanical devices on large-area substrates

(5) Chu, V a Pedro Conde, J a Boucinha, M a Gaspar, J a Brogueira, P a

a INESC (Portugal)

Author keywords

Actuation; Microelectromechanical; Resonance; Thin films; Thin film transistors

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; DEPOSITION; ELECTROSTATIC ACTUATORS; GLASS; MICROMACHINING; POLYETHYLENE TEREPHTHALATES; RESONATORS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE; SUBSTRATES; THIN FILM TRANSISTORS;

AIR-GAP THIN FILM TRANSISTOR; MICROCRYSTALLINE SILICON; MICRORELAY; MICRORESONATOR; THIN FILM MICROELECTROMECHANICAL DEVICE;

MICROELECTROMECHANICAL DEVICES;

EID: 0034825691 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.80-81.429 Document Type: Conference Paper

Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.