Surface diffusion of SiH3 radicals and growth mechanism of a-Si:H and microcrystalline Si

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 11-15

  Dewarrat, R ^a   Robertson, J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

A Si:H; Hydrogen; Microcrystalline silicon

Indexed keywords

CHEMICAL BONDS; DIFFUSION; HYDROGEN; HYDROGENATION; SOLAR CELLS;

MICROCRYSTALLINE SILICON;

AMORPHOUS SILICON;

EID: 0037416582     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01173-2     Document Type: Conference Paper

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