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Volumn 299, Issue 302, 2002, Pages 48-52

Binding and surface diffusion of SiH3 radicals on a growing a-Si:H surface

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL BONDS; DIFFUSION; GROWTH (MATERIALS); SURFACE REACTIONS;

EID: 0036540623     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)00994-2     Document Type: Article
Times cited : (6)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.