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Volumn 299, Issue 302, 2002, Pages 48-52
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Binding and surface diffusion of SiH3 radicals on a growing a-Si:H surface
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
CHEMICAL BONDS;
DIFFUSION;
GROWTH (MATERIALS);
SURFACE REACTIONS;
SURFACE DIFFUSION;
SILANES;
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EID: 0036540623
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)00994-2 Document Type: Article |
Times cited : (6)
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References (23)
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