Preparation of hafnium oxide thin film by electron beam evaporation of hafnium incorporating a post thermal process

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 451-456

  Xing, Su ^a   Zhang, Ninglin ^a   Song, Zhitang ^a   Shen, Qinwo ^a   Lin, Chenlu ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Electron beam evaporation; Hafnium oxide; Thermal oxidation

Indexed keywords

ELECTRON BEAMS; EVAPORATION; HAFNIUM COMPOUNDS; INTERFACES (MATERIALS); POLYCRYSTALLINE MATERIALS; THERMOOXIDATION;

ELECTRON BEAM EVAPORATION;

THIN FILMS;

EID: 0037393375     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00911-5     Document Type: Conference Paper

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