In situ energy-dispersive x-ray diffraction system for time-resolved thin-film growth studies

Measurement Science and Technology

Volumn 14, Issue 3, 2003, Pages 336-345

  Ellmer, K ^a   Mientus, R ^b   Weiss V ^a   Rossner, H ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b Optotransmitter Umweltschutz T   (Germany)

Author keywords

Energy dispersive x ray diffraction; Film growth; ITO films; Magnetron sputtering; Synchrotron radiation; ZnO films

Indexed keywords

DOPING (ADDITIVES); ENERGY DISPERSIVE SPECTROSCOPY; FILM GROWTH; GRAIN SIZE AND SHAPE; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; MAGNETS; NUCLEATION; POLYCRYSTALLINE MATERIALS; STRAIN; SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

DIFFRACTION ANGLES;

THIN FILMS;

FILM; OXIDE; OXIDE FILM; X-RAY TECHNIQUE;

EID: 0037349319     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/3/313     Document Type: Article

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