Real-time X-ray scattering studies of surface structure during metalorganic chemical vapor deposition of GaN

MRS Bulletin

Volumn 24, Issue 1, 1999, Pages 21-25

  Stephenson, G Brian ^a   Eastman, Jeffrey A ^a   Auciello, Orlando ^a   Munkholm, Anneli ^a   Thompson, Carol ^a   Fuoss, Paul H ^a   Fini, Paul ^a   DenBaars, Steven P ^a   Speck, James S ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL DEFECTS; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SURFACE STRUCTURE; THIN FILMS; X RAY SCATTERING;

BRAGG PEAKS; CRYSTAL TRUNCATION RODS; GALLIUM NITRIDE;

SEMICONDUCTING FILMS;

EID: 0032740538     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S088376940005168X     Document Type: Article

References (21)

1. P.H. Fuoss, D.W. Kisker, F.J. Lamelas, G.B. Stephenson, P. Imperatori, and S. Brennan, Phys. Rev. Lett. 69 (1992) p. 2791;
2. D.W. Kisker, G.B. Stephenson, J. Tersoff, P.H. Fuoss, and S. Brennan, J. Cryst. Growth 163 (1996) p. 54.
3. M.V. Ramana Murty, T. Curcic, A. Judy, B.H. Cooper, A.R. Woll, J.D. Brock, S. Kycia, and R.L. Headrick, Phys. Rev. Lett. 80 (1998) p. 4713.
4. I. K. Robinson, K.L. Whiteaker, and D.A. Walko, Physica B 221 (1996) p. 70.
5. W.C. Elliott, P.F. Miceli, T. Tse, and P.W. Stephens, ibid. p. 65.
6. J. Alvarez, E. Lundgren, X. Torrelles, and S. Ferrer, Phys. Rev. B 57 (1998) p. 6325.
7. H. You, R.P. Chiarello, H.K. Kim, and K.G. Vandervoort, Phys. Rev. Lett. 70 (1993) p. 2900.
8. B.M. Lairson, A.P. Payne, S. Brennan, N.M. Rensing, B.J. Daniels, and B.M. Clemens, J. Appl. Phys. 78 (1995) p. 4449.
9. J.H. Je, D.Y. Noh, H.K. Kim, and K.S. Liang, ibid. 81 (1997) p. 6126.
10. R.L. Headrick, S. Kycia, A.R. Woll, J.D. Brock, and M.V. Ramana Murty, Phys. Rev. B 58 (1998) p. 4818.
11. B.K. Kellerman, E. Chason, D.P. Adams, T.M. Mayer, and J.M. White, Surf. Sci. 375 (1997) p. 331.
12. O. Robach, G. Renaud, A. Barbier, and P. Guenard, Surf. Rev. Lett. 5 (1997) p. 359.
13. H. Morkoc and S.N. Mohammad, Science 267 (1995) p. 51.
14. S. Brennan, P.H. Fuoss, J.L. Kahn, and D.W. Kisker, Nucl. Iustrum. Methods Phys. Res. A 291 (1990) p. 86.
15. D.W. Kisker, G.B. Stephenson, I. Kamiya, P.H. Fuoss, D.E. Aspnes, L. Mantese, and S. Brennan, Phys. Status Solidi A 152 (1995) p. 9.
16. P.H. Fuoss and S. Brennan, Annu. Rev. Mater. Sci. 20 (1990) p. 365;
17. I.K. Robinson and D.J. Tweet, Rep. Prog. Phys. 55 (1992) p. 599.
18. J.H. Neave, B.A. Joyce, P.J. Dobson, and N. Norton, Appl. Phys. A 31 (1983) p. 1.
19. E. Vlieg, A.W. Denier van der Gon, J.F. van der Veen, J.E. MacDonald, and C. Norris, Phys. Rev. Lett. 61 (1988) p. 2241.
20. S. Keller, B.P. Keller, Y-F. Wu, B. Heying, D. Kapolnek, J.S. Speck, U.K. Mishra, and S.P. DenBaars, Appl. Phys. Lett. 68 (1996) p. 1525.
21. C.D. Zuiker, D.M. Gruen, and A.R. Krauss, MRS Bulletin XX (5) (1995) p. 29.