In situ X-ray investigations of thin film growth

Thin Solid Films

Volumn 324, Issue 1-2, 1998, Pages 63-67

  Baranov, A M ^a   Mikhailov, I F ^b  

^a Res Institute of Vacuum Technique   (Russian Federation)

^b NATIONAL TECHNICAL UNIVERSITY   (Ukraine)

Author keywords

In situ X ray monitoring; Magnetron sputtering; Rf plasma enhanced chemical vapour deposition

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; MAGNETRON SPUTTERING; METALLIC FILMS; SURFACE ROUGHNESS; THIN FILMS; X RAY ANALYSIS;

IN SITU X RAY MONITORING;

FILM GROWTH;

EID: 0032124281     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01207-8     Document Type: Article

References (11)

1. E.S. Aydil, 187th Meeting of the Electrochemical Society, Proceedings Vol. 95-2, 1995.
2. W.L. Hsu, Appl. Phys. Lett. 59 (1991) 1427.
3. F.K. Urban, J.C. Comfor, J. Vac. Sci. Technol. A 14 (4) (1996) 2331.
4. I.F. Mikhailov, V.I. Pinegin, V.V. Sleptsov, A.M. Baranov, Cryst. Res. Technol. 30 (5) (1995) 643.
5. A. Baranov, S. Tereshin, I. Mikhailov, V. Pinegin, in: R.E. Fisher, W.J. Smith (Eds.), Current Developments in Optical Design and Engineering VI, Proc. SPIE, The Int. Soc. for Opt. Eng., Vol. 2863, 1996, p. 359.
6. M. Alvis, A. Rizzo, L. Tapfer, L. Vassanelli, Thin Solid Films 298 (1997) 130.
7. A. Stierle, T. Muhge, M. Zabel, J. Mater. Res. 9 (1994) 884.
8. I.F. Mikhailov, S.S. Borisova, L.P. Fomina, I.N. Babenko, in: A.V. Vinogradov (Ed.), X-ray Optics and Surface Science, The Int. Soc. for Opt. Eng., Proc. SPIE, Vol. 2453, 1995, pp. 186-215.
9. E. Luken, E. Ziegler, P. Hoghoj, A. Freund, E. Gerdau, A. Fontain, in: Abeles (Ed.), Optical Interference Coatings, The Int. Soc. for Opt. Eng., Proc. SPIE, Vol. 2253, 1994, 327.
10. A.V. Vinogradov (Ed.), Specular X-ray Optics, Mashinostroenie, Leningrad, 1989, in Russian.
11. E. Spiller, Soft X-ray Optics, SPIE Optical Engineering Press, 1994.