Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges

Journal of Applied Physics

Volumn 80, Issue 7, 1996, Pages 3699-3704

  Yang, Yun ^a   Wu, Hanming ^a  

^a INSTITUTE OF MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BOUNDARY CONDITIONS; ELECTRIC DISCHARGES; ELECTRIC SPACE CHARGE; ELECTROMAGNETIC FIELDS; ELECTRONS; IONIZATION; KINETIC THEORY; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PLASMA DENSITY; TEMPERATURE;

BOLTZMANN EQUATIONS; ELECTRON DISTRIBUTION FUNCTION; ELECTRON TEMPERATURE; INDUCTIVELY COUPLED PLASMAS; KINETIC ENERGY;

PLASMAS;

EID: 0030270781     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363319     Document Type: Article

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