Kinetic two-dimensional modeling of inductively coupled plasmas based on a hybrid kinetic approach

IEEE Transactions on Plasma Science

Volumn 27, Issue 5, 1999, Pages 1297-1309

  Kortshagen, Uwe ^a   Heil, Brian G ^a  

^a University of Minnesota   (United States)

Author keywords

Electron kinetics; Hybrid plasma model; Inductively coupled discharge

Indexed keywords

APPROXIMATION THEORY; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRONS; KINETIC THEORY OF GASES; MATHEMATICAL MODELS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; WAVE EQUATIONS;

INDUCTIVELY COUPLED PLASMAS;

PLASMA SIMULATION;

EID: 0033204279     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.799806     Document Type: Article

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