Modeling of nonlocal electron kinetics in a low-pressure inductively coupled plasma

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 53, Issue 1, 1996, Pages 1110-1124

  Kolobov, V I ^a,b   Parker, G J ^a,b   Hitchon, W N G ^a,b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001580544     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.53.1110     Document Type: Article

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