Mechanical characterization and reliability study of bistable SiO2/Si membranes for microfluidic applications

Sensors and Actuators, A: Physical

Volumn 99, Issue 1-2, 2002, Pages 216-219

  Malhaire, C ^a   Didiergeorges, A ^a   Bouchardy, M ^a   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

Bistable; Membrane; Pressure; Reliability; Stress

Indexed keywords

ETCHING; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL BISTABILITY; OXIDATION; PRESSURE EFFECTS; PROFILOMETRY; RELIABILITY; SEMICONDUCTING SILICON; SILICA; STRESS ANALYSIS; THIN FILMS;

BISTABLE MEMBRANES;

FLUIDICS;

EID: 0037197320     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00891-3     Document Type: Article

References (16)