Static characteristics of piezoelectric thin film buckling actuator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 9 SUPPL. B, 1996, Pages 5012-5014

  Wakabayashi, Shuichi ^a   Sakata, Minoru ^a   Goto, Hiroshi ^a   Takeuchi, Masashi ^a   Yada, Tsuneji ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

Buckling; Microactuator; Piezoelectric coefficient; PZT; RF magnetron sputtering; Thin film

Indexed keywords

MICROACTUATOR; PIEZOELECTRIC COEFFICIENT;

ACTUATORS; BUCKLING; ELECTRIC FIELDS; EXPERIMENTS; MAGNETRON SPUTTERING; THIN FILMS;

PIEZOELECTRIC MATERIALS;

EID: 0030234794     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.5012     Document Type: Article

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