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Volumn 444, Issue , 1997, Pages 137-142
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Effect of thermoelastic stress on the pressure response of a composite SiO2/Si membrane
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPOSITE MATERIALS;
DISTANCE MEASUREMENT;
FINITE ELEMENT METHOD;
MATHEMATICAL MODELS;
PRESSURE;
SENSORS;
SILICA;
SILICON ON INSULATOR TECHNOLOGY;
SILICON WAFERS;
STRESSES;
THERMOELASTICITY;
THREE DIMENSIONAL;
DEFLECTION MEASUREMENT;
PRESSURE RESPONSE;
PRESSURE SENSORS;
PROFILOMETRY;
MEMBRANES;
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EID: 0030643197
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (6)
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References (17)
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